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DUPRA

DUPRA

(DUPRA® is a registered trademark of Daikin Industries, Ltd.)

Daikin Ultra Pure Rubber Arts - DUPRA -

What is DUPRA®?

DUPRA® is a Perfluoroelastomer (FFKM) provided by Toho Kasei, a member of the Daikin Group.

The perfluoroelastomer, similarly as Polytetrafluoroethylene (PTFE), features with var ious excellent performances such as heat resistance, chemical resistance, non-adhesiveness, weather durability, etc.

The polymer skeleton of perfluoroelastomer is structured with carbon and fluorine (C-F) which shows a bond energy higher than that of carbon and hydrogen (C- H), which forms the skeleton of general organic compounds, and it shows the high durability to all sorts of external energies because of the stability.


*“Elastomer” stands for the polymers having the property of returning to almost the same shape and dimensions as the original quickly after being deformed with a light force, and the force is removed by forming a bridge between structuring polymers.

Heat Resistance,Chemical Resistance,Gas Resistance,Low Gas Emission,Cleanliness,Plasma Resistance

DUPRA®Product Lineup

Recommended Process Thermal Process
Oxidation/Diffusion
Plasma Process
CVD/Etching/Ashing
Cleaning Process
Wet
Product Lineup DU351 DU353(E) DU551 DU3R1(E) DU341 DU354
Features Standard Heat
Resistant
Extra Heat
Resistant
Plasma
Resistant
Fluorine
Radical
Resistant
Chemical
Solution
Resistant
Appearance DU351 DU353(E) DU551 DU3R1(E) DU341 DU354
Color Black Black Black Red Brown Black
Heatproof Temp. for Continuous
Operation (guideline)
[℃] 290 295 300 295 295 290
Heatproof Temp. (guideline) [℃] 310 310 330 305 305 300
Hardness(1)《 ShoreA》 74 77 75 74 72 75
Tensile Strength(2) [MPa] 19.0 18.6 17.5 15.0 14.0 16.1
Breaking Elongation(2) [%] 200.0 205.0 170.0 260.0 250.0 205.0
100%Modulus(2) [MPa] 5.2 6.0 7.4 5.2 2.6 6.0
Compression Set(3) 250℃,after 70 hours [%] 10 8 8 12 10 32
300℃,after 70 hours [%] 30 24 18 33 30 -
Option: Low Tenacity Grade - - - -
(1)According to JIS K 6253-1
(2)Dumbbell Test according to JIS K 6251
(3)AS568-214 O-ring 25% (R.T.) O-ring evaluation according to JIS K 6262

Features of DUPRA®

Product Code Features
DU351 Thermal/chemical resistance superior to fluorine rubber (FKM).
A standard product code of DUPRA ® with extremely low metal content.
DU353(E) A standard product code for thermal processing.
Shows the excellent thermal resistance and gas resistance among FFKMs.
DU551 A product code for super thermal resistance. Increased thermal resistance while maintaining the performance of DU353(E).
Shows the top class heat proof performance among FFKMs.
DU3R1(E) A standard product code for plasma processing.
Shows less weight fluctuation to oxygen and fluorine plasma, low dust generation.
DU341 Having high fluorine type radical resistance, shows the highest performance in the plasma processing.
DU354 A product code for the cleaning processes. Having excellent resistance to chemical fluids, such as the stro ng acid or strong alkaline and shows extremely low elution of metals.

DUPRA® Application Selection Table

Process Sealing Material Environment Recommended
Product Codes
Temperature Gas Type
Thermal
Process
Thermal Resistance LPCVD
Oxidation
Diffusion
Lamp Anneal
ALD
25 ‒ 300℃ O2, H2O, H2O2, O3
NH3, SiH4, N2, HCI,
NF3, CIF3, F2, HF, etc
DU551
DU353(E)
DU351
Plasma
Process
Plasma Resistance HDPCVD
PECVD
MetalCVD
Etching
Ashing
25 ‒ 250℃ CF4, O2, HBr, Cl2,
NH3, SiH4, H2O,
Vaper, TEOS, NF3,
CIF3, F2, HF, etc
DU341
DU3R1(E)
DU353(E)/DU551
Cleaning
Process
Chemical Resistance Cleaning
Etching
Stripping
25 ‒ 180℃ SC-1, SC-2, O3, HF,
H2SO4, H2OVaper,
IPA, H2O2, NH3,
Hydroxilamine etc
DU354