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DUPRA

DUPRA
feature of DUPRA

DUPRA™, a perfluoroelastomer seal for semiconductor
(original product of Daikin Industries)

"DUPRA™" is a perfluoro-sealing material for the next generation semiconductor devices, which is manufactured and provided based on the "extra clean sealing concept" in the total process from the material to the final packaging. It has a superior high ⁄ clean seal and heat resistance performances required to meet the needs for longer life span of your products.

We, TOHO KASEI, provide you the "DUPRA™" that meets the new needs in the semiconductors manufacturing business fields.

DUPRA Lineup by Application

Process Recommended model Properties Option Properties of option
Diffusion DU353(E)
DU151
  • heat resistance
  • Plasma resistance and fluorine radical resistance
  • Low particle generation
DU351
  • Less hard than DU353
CVD DU3R1(E)
DU151
  • heat resistance
  • Plasma resistance and fluorine radical resistance
  • Low particle generation
DU381
DU351
DU171
DU182
DU192
  • Excellent heat resistance and Low particle generation
  • Excellent heat resistance ideal for compound plasma
  • Excellent crack resistance
  • Excellent F radical resistance
  • Excellent plasma resistance
Etch DU3R1(E)
DU151
  • heat resistance
  • Plasma resistance and fluorine radical resistance
  • Low particle generation
DU171
DU182
DU192
  • Excellent crack resistance
  • Excellent F radical resistance
  • Excellent plasma resistance
Wet DU151
DU151
  • Chemical-resistance
  • Low metal content and Low F ion
DU351
  • High temperature applications
  • Excellent ozone resistance
(E) Processed to achieve low sticking property

DTypes of DUPRA and Physical Properties ⁄ DU-100 Series Standard Grade

  DU151 DU171 DU182 DU192
  DU151 DU151 DU151 DU151
Color Black Grey Yellow White
Heat-resistant temperature(°C) 200°C 200°C 200°C 200°C
Hardness (ShoreA) 81 72 76 78
Tensile strength(Mpa) 22.5 19 15.5 20
Breaking elongation(%) 180 190 170 160
100% modulus (Mpa) 7 6 7 9
Compression set
(70 hours at 200°C) (%)
23 22 25 23

Types of DUPRA and Physical Properties ⁄ DU-300 Series Heat-resistance Grade

  DU351 DU353(E) DU381 DU3R1(E)
  DU151 DU151 DU151 DU151
Color Black Grey Yellow White
Heat-resistant temperature(°C) 300°C 300°C 300°C 300°C
Hardness (ShoreA) 74 77 74 74
Tensile strength (Mpa) 19 17.6 15 15
Breaking elongation(%) 200 200 210 230
100% modulus (Mpa) 6.0 5.7 6.0 6.0
Compression set
(70 hours at 200°C) (%)
25 25 30 30